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Applied Optics
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May 14, 2020
Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques
Jeremy Béguelin, Wilfried Noell, Toralf Scharf, et al.
Applied Optics
|
May 14, 2020
Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization
Jeremy Béguelin, Michael Symeonidis, Wilfried Noell, et al.
Optics Express
|
October 14, 2010
Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler, et al.
Optics Express
|
March 17, 2019
Improvements on the uniformity of large-area microlens arrays in Fused Silica
Raoul Kirner, Jeremy Béguelin, Martin Eisner, et al.
Optics Express
|
November 6, 2019
Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography
Andreas Vetter, Chen Yan, Raoul Kirner, et al.
Optics Express
|
November 26, 2008
Two step process for the fabrication of diffraction limited concave microlens arrays
Patrick Ruffieux, Toralf Scharf, Irène Philipoussis, et al.
Applied Optics
|
April 23, 2010
Flexible beam shaping system using fly's eye condenser
Norbert Lindlein, Andreas Bich, Martin Eisner, et al.
Optics Express
|
August 23, 2018
Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source
Andreas Vetter, Raoul Kirner, Dmitrijs Opalevs, et al.
Optics Express
|
May 4, 2016
Refraction limit of miniaturized optical systems: a ball-lens example
Myun-Sik Kim, Toralf Scharf, Stefan Mühlig, et al.
Optics Express
|
February 7, 2018
Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm
Raoul Kirner, Andreas Vetter, Dmitrijs Opalevs, et al.
Page
of 2
Search research articles
Search
Showing results (1-10 of 12) with videos related to
Sort By:
Page
of 2
Applied Optics
|
May 14, 2020
Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques
Jeremy Béguelin, Wilfried Noell, Toralf Scharf, et al.
Applied Optics
|
May 14, 2020
Optical characterization of high numerical aperture microlenses for quality assessment and fabrication process optimization
Jeremy Béguelin, Michael Symeonidis, Wilfried Noell, et al.
Optics Express
|
October 14, 2010
Advanced mask aligner lithography: fabrication of periodic patterns using pinhole array mask and Talbot effect
Lorenz Stuerzebecher, Torsten Harzendorf, Uwe Vogler, et al.
Optics Express
|
March 17, 2019
Improvements on the uniformity of large-area microlens arrays in Fused Silica
Raoul Kirner, Jeremy Béguelin, Martin Eisner, et al.
Optics Express
|
November 6, 2019
Computational rule-based approach for corner correction of non-Manhattan geometries in mask aligner photolithography
Andreas Vetter, Chen Yan, Raoul Kirner, et al.
Optics Express
|
November 26, 2008
Two step process for the fabrication of diffraction limited concave microlens arrays
Patrick Ruffieux, Toralf Scharf, Irène Philipoussis, et al.
Applied Optics
|
April 23, 2010
Flexible beam shaping system using fly's eye condenser
Norbert Lindlein, Andreas Bich, Martin Eisner, et al.
Optics Express
|
August 23, 2018
Printing sub-micron structures using Talbot mask-aligner lithography with a 193 nm CW laser light source
Andreas Vetter, Raoul Kirner, Dmitrijs Opalevs, et al.
Optics Express
|
May 4, 2016
Refraction limit of miniaturized optical systems: a ball-lens example
Myun-Sik Kim, Toralf Scharf, Stefan Mühlig, et al.
Optics Express
|
February 7, 2018
Mask-aligner lithography using a continuous-wave diode laser frequency-quadrupled to 193 nm
Raoul Kirner, Andreas Vetter, Dmitrijs Opalevs, et al.
Page
of 2