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Optics Express
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September 17, 2008
Fast approximation of transfer cross coefficient for optical proximity correction
Romuald Sabatier, Caroline Fossati, Salah Bourennane, et al.
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of 1
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Showing results (1-10 of 1) with videos related to
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Page
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Optics Express
|
September 17, 2008
Fast approximation of transfer cross coefficient for optical proximity correction
Romuald Sabatier, Caroline Fossati, Salah Bourennane, et al.
Page
of 1