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ACS Omega
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February 6, 2023
Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography
Ziyu Hu, Rongbo Zhao, Xiaolin Wang, et al.
Applied Optics
|
May 3, 2023
Process optimization of line patterns in extreme ultraviolet lithography using machine learning and a simulated annealing algorithm
Rongbo Zhao, Ziyu Hu, Xiaolin Wang, et al.
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Search research articles
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Showing results (11-20 of 12) with videos related to
Sort By:
Page
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This site can display upto 12 results.
ACS Omega
|
February 6, 2023
Canny Algorithm Enabling Precise Offline Line Edge Roughness Acquisition in High-Resolution Lithography
Ziyu Hu, Rongbo Zhao, Xiaolin Wang, et al.
Applied Optics
|
May 3, 2023
Process optimization of line patterns in extreme ultraviolet lithography using machine learning and a simulated annealing algorithm
Rongbo Zhao, Ziyu Hu, Xiaolin Wang, et al.
Page
of 2