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Applied Optics
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January 6, 2023
Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
Leonhard M Lohr, Richard Ciesielski, Sven Glabisch, et al.
Applied Optics
|
April 26, 2022
Design of an efficient illuminator for partially coherent sources in the extreme ultraviolet
Bernhard Lüttgenau, Dieter Panitzek, Serhiy Danylyuk, et al.
Optics Express
|
July 19, 2020
Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
Lukas Bahrenberg, Serhiy Danylyuk, Sven Glabisch, et al.
Optics Express
|
September 10, 2020
Computational proximity lithography with extreme ultraviolet radiation
Valerie Deuter, Maciej Grochowicz, Sascha Brose, et al.
Optics Express
|
October 20, 2015
Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
Georg Kunkemöller, Tobias W W Mass, Ann-Katrin U Michel, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 5) with videos related to
Sort By:
Page
of 1
Applied Optics
|
January 6, 2023
Nanoscale grating characterization using EUV scatterometry and soft x-ray scattering with plasma and synchrotron radiation
Leonhard M Lohr, Richard Ciesielski, Sven Glabisch, et al.
Applied Optics
|
April 26, 2022
Design of an efficient illuminator for partially coherent sources in the extreme ultraviolet
Bernhard Lüttgenau, Dieter Panitzek, Serhiy Danylyuk, et al.
Optics Express
|
July 19, 2020
Characterization of nanoscale gratings by spectroscopic reflectometry in the extreme ultraviolet with a stand-alone setup
Lukas Bahrenberg, Serhiy Danylyuk, Sven Glabisch, et al.
Optics Express
|
September 10, 2020
Computational proximity lithography with extreme ultraviolet radiation
Valerie Deuter, Maciej Grochowicz, Sascha Brose, et al.
Optics Express
|
October 20, 2015
Extreme ultraviolet proximity lithography for fast, flexible and parallel fabrication of infrared antennas
Georg Kunkemöller, Tobias W W Mass, Ann-Katrin U Michel, et al.
Page
of 1