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Sikun Li

Showing results (31-40 of 36) with videos related to

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Applied Optics|May 4, 2016
Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial imageBoer Zhu, Xiangzhao Wang, Sikun Li, et al.
Optics Express|March 26, 2014
Aberration measurement technique based on an analytical linear model of a through-focus aerial imageGuanyong Yan, Xiangzhao Wang, Sikun Li, et al.
Applied Optics|May 14, 2020
Micromirror array allocation algorithm based on deconvolutionZhifan Liu, Chaoxing Yang, Yang Bu, et al.
Optics Express|July 19, 2020
Critical pattern selection method for full-chip source and mask optimizationLufeng Liao, Sikun Li, Xiangzhao Wang, et al.
Optics Express|March 17, 2019
Jones pupil metrology of lithographic projection lens and its optimal configuration in the presence of error sourcesZejiang Meng, Sikun Li, Xiangzhao Wang, et al.
Optics Express|December 28, 2019
Fast thermal aberration model for lithographic projection lensesBoer Zhu, Sikun Li, Yanjie Mao, et al.
Pageof 4

Showing results (31-40 of 36) with videos related to

Sort By:
Pageof 4
You have reached the last page of results.This site can display upto 36 results.
Applied Optics|May 4, 2016
Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial imageBoer Zhu, Xiangzhao Wang, Sikun Li, et al.
Optics Express|March 26, 2014
Aberration measurement technique based on an analytical linear model of a through-focus aerial imageGuanyong Yan, Xiangzhao Wang, Sikun Li, et al.
Applied Optics|May 14, 2020
Micromirror array allocation algorithm based on deconvolutionZhifan Liu, Chaoxing Yang, Yang Bu, et al.
Optics Express|July 19, 2020
Critical pattern selection method for full-chip source and mask optimizationLufeng Liao, Sikun Li, Xiangzhao Wang, et al.
Optics Express|March 17, 2019
Jones pupil metrology of lithographic projection lens and its optimal configuration in the presence of error sourcesZejiang Meng, Sikun Li, Xiangzhao Wang, et al.
Optics Express|December 28, 2019
Fast thermal aberration model for lithographic projection lensesBoer Zhu, Sikun Li, Yanjie Mao, et al.
Pageof 4