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Applied Optics
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July 15, 2021
Measurement algorithm for wafer alignment based on principal component analysis
Ting Shu, Shaoqing Wang, Jinghao Xu, et al.
Applied Optics
|
November 22, 2021
Sub-pixel position estimation algorithm based on Gaussian fitting and sampling theorem interpolation for wafer alignment
Songyong Pan, Shaoqing Wang, Jinghao Xu, et al.
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of 1
Search research articles
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Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Applied Optics
|
July 15, 2021
Measurement algorithm for wafer alignment based on principal component analysis
Ting Shu, Shaoqing Wang, Jinghao Xu, et al.
Applied Optics
|
November 22, 2021
Sub-pixel position estimation algorithm based on Gaussian fitting and sampling theorem interpolation for wafer alignment
Songyong Pan, Shaoqing Wang, Jinghao Xu, et al.
Page
of 1