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Accounts of Chemical Research
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June 2, 2020
Mechanisms of Thermal Atomic Layer Etching
Steven M George
Chemical Reviews
|
December 2, 2009
Atomic layer deposition: an overview
Steven M George
ACS Nano
|
May 25, 2016
Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions
Steven M George, Younghee Lee
ACS Nano
|
January 22, 2015
Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride
Younghee Lee, Steven M George
The Journal of Chemical Physics
|
February 10, 2017
Competition between Al<sub>2</sub>O<sub>3</sub> atomic layer etching and AlF<sub>3</sub> atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride
Jaime W DuMont, Steven M George
ACS Applied Materials & Interfaces
|
September 7, 2017
WO<sub>3</sub> and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms
Nicholas R Johnson, Steven M George
Accounts of Chemical Research
|
March 3, 2009
Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers
Steven M George, Byunghoon Yoon, Arrelaine A Dameron
ACS Applied Materials & Interfaces
|
May 13, 2015
Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment
Matthias J Young, Charles B Musgrave, Steven M George
Nanotechnology
|
July 6, 2011
Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor
Luis F Hakim, Steven M George, Alan W Weimer
ACS Applied Materials & Interfaces
|
September 10, 2014
Growth and properties of hafnicone and HfO(2)/hafnicone nanolaminate and alloy films using molecular layer deposition techniques
Byoung H Lee, Virginia R Anderson, Steven M George
Page
of 5
Search research articles
Search
Showing results (1-10 of 47) with videos related to
Sort By:
Page
of 5
Accounts of Chemical Research
|
June 2, 2020
Mechanisms of Thermal Atomic Layer Etching
Steven M George
Chemical Reviews
|
December 2, 2009
Atomic layer deposition: an overview
Steven M George
ACS Nano
|
May 25, 2016
Prospects for Thermal Atomic Layer Etching Using Sequential, Self-Limiting Fluorination and Ligand-Exchange Reactions
Steven M George, Younghee Lee
ACS Nano
|
January 22, 2015
Atomic layer etching of Al2O3 using sequential, self-limiting thermal reactions with Sn(acac)2 and hydrogen fluoride
Younghee Lee, Steven M George
The Journal of Chemical Physics
|
February 10, 2017
Competition between Al<sub>2</sub>O<sub>3</sub> atomic layer etching and AlF<sub>3</sub> atomic layer deposition using sequential exposures of trimethylaluminum and hydrogen fluoride
Jaime W DuMont, Steven M George
ACS Applied Materials & Interfaces
|
September 7, 2017
WO<sub>3</sub> and W Thermal Atomic Layer Etching Using "Conversion-Fluorination" and "Oxidation-Conversion-Fluorination" Mechanisms
Nicholas R Johnson, Steven M George
Accounts of Chemical Research
|
March 3, 2009
Surface chemistry for molecular layer deposition of organic and hybrid organic-inorganic polymers
Steven M George, Byunghoon Yoon, Arrelaine A Dameron
ACS Applied Materials & Interfaces
|
May 13, 2015
Growth and Characterization of Al2O3 Atomic Layer Deposition Films on sp(2)-Graphitic Carbon Substrates Using NO2/Trimethylaluminum Pretreatment
Matthias J Young, Charles B Musgrave, Steven M George
Nanotechnology
|
July 6, 2011
Conformal nanocoating of zirconia nanoparticles by atomic layer deposition in a fluidized bed reactor
Luis F Hakim, Steven M George, Alan W Weimer
ACS Applied Materials & Interfaces
|
September 10, 2014
Growth and properties of hafnicone and HfO(2)/hafnicone nanolaminate and alloy films using molecular layer deposition techniques
Byoung H Lee, Virginia R Anderson, Steven M George
Page
of 5