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Wangfu Chen

Showing results (1-10 of 2) with videos related to

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Applied Optics|February 2, 2010
Extended dual-grating alignment method for optical projection lithographyWangfu Chen, Wei Yan, Song Hu, et al.
Optics Express|June 12, 2008
Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithographyShaolin Zhou, Yongqi Fu, Xiaoping Tang, et al.
Pageof 1

Showing results (1-10 of 2) with videos related to

Sort By:
Pageof 1
Applied Optics|February 2, 2010
Extended dual-grating alignment method for optical projection lithographyWangfu Chen, Wei Yan, Song Hu, et al.
Optics Express|June 12, 2008
Fourier-based analysis of moiré fringe patterns of superposed gratings in alignment of nanolithographyShaolin Zhou, Yongqi Fu, Xiaoping Tang, et al.
Pageof 1