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Sensors (Basel, Switzerland)|February 11, 2023
Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA)Haozhi Zhang, Hao Jia, Weiwen Feng, et al.
Micromachines|July 29, 2023
Silicon Micromachined TSVs for Backside Interconnection of Ultra-Small Pressure SensorsWeiwen Feng, Peng Li, Haozhi Zhang, et al.
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