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Related Experiment Video

Updated: Aug 10, 2025

Thermal Measurement Techniques in Analytical Microfluidic Devices
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Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA).

Haozhi Zhang1,2, Hao Jia1,2, Weiwen Feng1,2

  • 1State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China.

Sensors (Basel, Switzerland)
|February 11, 2023
PubMed
Summary

Developed ultra-responsive microelectromechanical systems (MEMS) thermopiles enable highly sensitive differential thermal analysis (DTA). These novel MEMS sensors offer significant improvements in power and temperature responsivity for advanced material characterization.

Keywords:
DTAMEMS thermopileMIS processdifferential thermal analysissingle-crystal silicon thermocouples

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Area of Science:

  • Materials Science
  • Microelectromechanical Systems (MEMS)
  • Analytical Chemistry

Background:

  • Differential thermal analysis (DTA) is crucial for material characterization.
  • Existing DTA sensors often lack the required sensitivity and speed for dynamic analysis.
  • Advancements in MEMS technology offer potential for developing superior thermal analysis sensors.

Purpose of the Study:

  • To develop ultra-responsive single-crystal silicon MEMS thermopiles for enhanced DTA.
  • To achieve high sensitivity and rapid thermal response for accurate material analysis.
  • To demonstrate the application of these MEMS sensors in characterizing phase transitions and chemical processes.

Main Methods:

  • Fabrication of suspended thermopiles using a novel "microholes interetch and sealing (MIS)" technique.
  • Integration of high-density n-type/p-type single-crystal silicon thermocouples within each thermopile.
  • Batch fabrication of differential MEMS DTA chips with small sample areas (~0.045 mm2).

Main Results:

  • Achieved outstanding power responsivity (99.5 V/W) and temperature responsivity (27.8 mV/°C), exceeding existing sensors by over 4 times.
  • Accurately measured the melting point of indium across a wide range of heating rates (1-100 °C/s).
  • Successfully characterized the multi-stage dehydration process of copper sulfate pentahydrate (CuSO4·5H2O).

Conclusions:

  • The developed MEMS thermopile sensors provide ultra-high responsivity for DTA.
  • These high-performance, cost-effective MEMS chips enable rapid and accurate thermal characterization.
  • The technology holds significant promise for diverse applications requiring precise thermal analysis.