Haozhi Zhang
3PUBLICATIONS
5CO-AUTHORS
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Publications (3)
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|Jul 29, 2023
Silicon Micromachined TSVs for Backside Interconnection of Ultra-Small Pressure Sensors.Weiwen Feng, Peng Li, Haozhi Zhang
|Mar 24, 2023
1ppm-detectable hydrogen gas sensors by using highly sensitive P+/N+ single-crystalline silicon thermopiles.Haozhi Zhang, Hao Jia, Zao Ni
|Feb 11, 2023
Ultra-Responsive MEMS Sensing Chip for Differential Thermal Analysis (DTA).Haozhi Zhang, Hao Jia, Weiwen Feng
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