Heng Yang
8PUBLICATIONS
12CO-AUTHORS
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Publications (8)
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|Mar 10, 2026
AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder.Fang Wang, Hao Yu, Yechen Miao
|Oct 29, 2024
A Drosophila-inspired intelligent olfactory biomimetic sensing system for gas recognition in complex environments.Xiawei Yue, Jiachuang Wang, Heng Yang
|Jul 29, 2023
Silicon Micromachined TSVs for Backside Interconnection of Ultra-Small Pressure Sensors.Weiwen Feng, Peng Li, Haozhi Zhang
|Mar 29, 2023
Aluminum Nitride Piezoelectric Micromachined Ultrasound Transducer Arrays for Non-Invasive Monitoring of Radial Artery Stiffness.Sheng Wu, Kangfu Liu, Wenjing Wang
|May 28, 2022
Integrated Piezoresistive Normal Force Sensors Fabricated Using Transfer Processes with Stiction Effect Temporary Handling.Ni Liu, Peng Zhong, Chaoyue Zheng
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