Tao Wu

16PUBLICATIONS
21CO-AUTHORS
Elemental semiconductorsWireless communication systems and technologies (incl. microwave and millimetrewave)MicroelectronicsMicroelectromechanical systems (MEMS)Biomedical imaging
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Publications (16)

|Jul 27, 2026
Effect of Strain Induced by Varying Bottom Electrode Thicknesses on Ferroelectric Properties of Pt/Al0.7Sc0.3N/Pt Capacitors.

|Oct 17, 2025
Piezoelectric-Metal Phononic Crystal Enabling GHz Tunable Ultrahigh Q Quasi-BIC Mode.

Xuankai Xu, Jiawei Li, Ruoyu Wang

|Mar 20, 2025
Acousto-Optic Modulation on Silicon-Aluminum Nitride Hybrid-Integrated Platform for Cryogenic Applications.

Weixiong Huang, Lipeng Xia, Jiawei Li

|Mar 05, 2025
A miniaturized MEMS accelerometer with anti-spring mechanism for enhancing sensitivity.

Ruihong Xiong, Xuankai Xu, Yushuai Liu

|Sep 11, 2024
A low-voltage-driven MEMS ultrasonic phased-array transducer for fast 3D volumetric imaging.

Yun Zhang, Tong Jin, Yining Deng

|Apr 27, 2024
Piezoelectric Micromachined Ultrasonic Transducers with Micro-Hole Inter-Etch and Sealing Process on (111) Silicon Wafer.

Yunhao Wang, Sheng Wu, Wenjing Wang

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Frequent Collaborators

2 joint publications

Sheng Wu

2 joint publications

Kangfu Liu

1 joint publications

Si-Yuan Yu

1 joint publications

Cheng He