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September 28, 2024
Integrated Amorphous Carbon Film Temperature Sensor with Silicon Accelerometer into MEMS Sensor
Qi Zhang, Xiaoya Liang, Wenzhe Bi, et al.
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Search research articles
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Showing results (1-10 of 1) with videos related to
Sort By:
Page
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Micromachines
|
September 28, 2024
Integrated Amorphous Carbon Film Temperature Sensor with Silicon Accelerometer into MEMS Sensor
Qi Zhang, Xiaoya Liang, Wenzhe Bi, et al.
Page
of 1