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Optics Letters
|
July 1, 2024
Mask structure optimization for beyond EUV lithography
Ziqi Li, Lisong Dong, Ma Xu, et al.
Optics Express
|
November 22, 2024
LIC-CGAN: fast lithography latent images calculation method for large-area masks using deep learning
Yihan Zhao, Lisong Dong, Ziqi Li, et al.
Applied Optics
|
October 19, 2023
Aberration budget analysis of EUV lithography from the imaging performance of a contact layer in a 5 nm technology node
Zhishu Chen, Lisong Dong, Huwen Ding, et al.
Nanoscale Advances
|
May 28, 2026
EPE contribution analysis method of multiple patterning lithography by Monte Carlo and Sobol sensitivity analysis
Fei Ai, Xiaojing Su, Yajuan Su, et al.
Applied Optics
|
February 23, 2023
Process optimization of contact hole patterns via a simulated annealing algorithm in extreme ultraviolet lithography
Rongbo Zhao, Yayi Wei, Hong Xu, et al.
Applied Optics
|
October 18, 2022
Optical proximity correction by using unsupervised learning and the patch loss function
Pengpeng Yuan, Peng Xu, Le Ma, et al.
Optics Express
|
June 29, 2023
Decomposition-learning-based thick-mask model for partially coherent lithography system
Ziqi Li, Lisong Dong, Xu Ma, et al.
Optics Express
|
October 7, 2021
Compensation of EUV lithography mask blank defect based on an advanced genetic algorithm
Ruixuan Wu, Lisong Dong, Xu Ma, et al.
Applied Optics
|
December 1, 2023
Optical proximity correction by using unsupervised learning and the patch loss function: publisher's note
Pengpeng Yuan, Peng Xu, Le Ma, et al.
Optics Express
|
July 21, 2023
Influence of the vibration of extreme ultraviolet lithographic tool stages on imaging
Hao Shen, Libin Zhang, Yayi Wei, et al.
Page
of 7
Search research articles
Search
Showing results (11-20 of 61) with videos related to
Sort By:
Page
of 7
Optics Letters
|
July 1, 2024
Mask structure optimization for beyond EUV lithography
Ziqi Li, Lisong Dong, Ma Xu, et al.
Optics Express
|
November 22, 2024
LIC-CGAN: fast lithography latent images calculation method for large-area masks using deep learning
Yihan Zhao, Lisong Dong, Ziqi Li, et al.
Applied Optics
|
October 19, 2023
Aberration budget analysis of EUV lithography from the imaging performance of a contact layer in a 5 nm technology node
Zhishu Chen, Lisong Dong, Huwen Ding, et al.
Nanoscale Advances
|
May 28, 2026
EPE contribution analysis method of multiple patterning lithography by Monte Carlo and Sobol sensitivity analysis
Fei Ai, Xiaojing Su, Yajuan Su, et al.
Applied Optics
|
February 23, 2023
Process optimization of contact hole patterns via a simulated annealing algorithm in extreme ultraviolet lithography
Rongbo Zhao, Yayi Wei, Hong Xu, et al.
Applied Optics
|
October 18, 2022
Optical proximity correction by using unsupervised learning and the patch loss function
Pengpeng Yuan, Peng Xu, Le Ma, et al.
Optics Express
|
June 29, 2023
Decomposition-learning-based thick-mask model for partially coherent lithography system
Ziqi Li, Lisong Dong, Xu Ma, et al.
Optics Express
|
October 7, 2021
Compensation of EUV lithography mask blank defect based on an advanced genetic algorithm
Ruixuan Wu, Lisong Dong, Xu Ma, et al.
Applied Optics
|
December 1, 2023
Optical proximity correction by using unsupervised learning and the patch loss function: publisher's note
Pengpeng Yuan, Peng Xu, Le Ma, et al.
Optics Express
|
July 21, 2023
Influence of the vibration of extreme ultraviolet lithographic tool stages on imaging
Hao Shen, Libin Zhang, Yayi Wei, et al.
Page
of 7