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Nanoscale
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February 8, 2024
Machine learning in electron beam lithography to boost photoresist formulation design for high-resolution patterning
Rongbo Zhao, Xiaolin Wang, Hong Xu, et al.
ACS Applied Materials & Interfaces
|
April 16, 2024
Machine Learning Applied to Electron Beam Lithography to Accelerate Process Optimization of a Contact Hole Layer
Rongbo Zhao, Xiaolin Wang, Yayi Wei, et al.
Optics Express
|
October 12, 2022
High-precision lithography thick-mask model based on a decomposition machine learning method
Ziqi Li, Lisong Dong, Xuyu Jing, et al.
Optics Express
|
April 27, 2022
Fast aerial image model for EUV lithography using the adjoint fully convolutional network
Jiaxin Lin, Lisong Dong, Taian Fan, et al.
Applied Optics
|
November 22, 2018
Retargeting of forbidden-dense-alternate structures for lithography capability improvement in advanced nodes
Jianfang He, Lisong Dong, Lijun Zhao, et al.
Optics Express
|
March 5, 2024
Dynamic budget analysis of multiple parameters in a lithography system based on the superposition of light intensity fluctuations
Jiashuo Wang, Xiaojing Su, Lisong Dong, et al.
Optics Express
|
September 13, 2019
Learning-based compressive sensing method for EUV lithographic source optimization
Jiaxin Lin, Lisong Dong, Taian Fan, et al.
Optics Letters
|
September 29, 2017
Mitigating the influence of wafer topography on the implantation process in optical lithography
Lisong Dong, Wenhui Chen, Taian Fan, et al.
Nanoscale Research Letters
|
November 17, 2016
A Novel Nanofabrication Technique of Silicon-Based Nanostructures
Lingkuan Meng, Xiaobin He, Jianfeng Gao, et al.
Nanoscale Research Letters
|
August 27, 2015
CMOS-Compatible Top-Down Fabrication of Periodic SiO2 Nanostructures using a Single Mask
Lingkuan Meng, Jianfeng Gao, Xiaobin He, et al.
Page
of 7
Search research articles
Search
Showing results (31-40 of 61) with videos related to
Sort By:
Page
of 7
Nanoscale
|
February 8, 2024
Machine learning in electron beam lithography to boost photoresist formulation design for high-resolution patterning
Rongbo Zhao, Xiaolin Wang, Hong Xu, et al.
ACS Applied Materials & Interfaces
|
April 16, 2024
Machine Learning Applied to Electron Beam Lithography to Accelerate Process Optimization of a Contact Hole Layer
Rongbo Zhao, Xiaolin Wang, Yayi Wei, et al.
Optics Express
|
October 12, 2022
High-precision lithography thick-mask model based on a decomposition machine learning method
Ziqi Li, Lisong Dong, Xuyu Jing, et al.
Optics Express
|
April 27, 2022
Fast aerial image model for EUV lithography using the adjoint fully convolutional network
Jiaxin Lin, Lisong Dong, Taian Fan, et al.
Applied Optics
|
November 22, 2018
Retargeting of forbidden-dense-alternate structures for lithography capability improvement in advanced nodes
Jianfang He, Lisong Dong, Lijun Zhao, et al.
Optics Express
|
March 5, 2024
Dynamic budget analysis of multiple parameters in a lithography system based on the superposition of light intensity fluctuations
Jiashuo Wang, Xiaojing Su, Lisong Dong, et al.
Optics Express
|
September 13, 2019
Learning-based compressive sensing method for EUV lithographic source optimization
Jiaxin Lin, Lisong Dong, Taian Fan, et al.
Optics Letters
|
September 29, 2017
Mitigating the influence of wafer topography on the implantation process in optical lithography
Lisong Dong, Wenhui Chen, Taian Fan, et al.
Nanoscale Research Letters
|
November 17, 2016
A Novel Nanofabrication Technique of Silicon-Based Nanostructures
Lingkuan Meng, Xiaobin He, Jianfeng Gao, et al.
Nanoscale Research Letters
|
August 27, 2015
CMOS-Compatible Top-Down Fabrication of Periodic SiO2 Nanostructures using a Single Mask
Lingkuan Meng, Jianfeng Gao, Xiaobin He, et al.
Page
of 7