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Materials (Basel, Switzerland)
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October 16, 2025
Process Temperature Control for Low Dishing in CMP
Yeongil Shin, Jongmin Jeong, Jiho Shin, et al.
Materials (Basel, Switzerland)
|
April 27, 2024
Novel Probability Density Function of Pad Asperity by Wear Effect over Time in Chemical Mechanical Planarization
Seonho Jeong, Yeongil Shin, Jongmin Jeong, et al.
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of 1
Search research articles
Search
Showing results (1-10 of 2) with videos related to
Sort By:
Page
of 1
Materials (Basel, Switzerland)
|
October 16, 2025
Process Temperature Control for Low Dishing in CMP
Yeongil Shin, Jongmin Jeong, Jiho Shin, et al.
Materials (Basel, Switzerland)
|
April 27, 2024
Novel Probability Density Function of Pad Asperity by Wear Effect over Time in Chemical Mechanical Planarization
Seonho Jeong, Yeongil Shin, Jongmin Jeong, et al.
Page
of 1