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Scientific Reports
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May 28, 2021
Low-temperature direct bonding of InP and diamond substrates under atmospheric conditions
Takashi Matsumae, Ryo Takigawa, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
January 21, 2023
High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi, et al.
Microsystems & Nanoengineering
|
January 28, 2022
Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging
Shingo Kariya, Takashi Matsumae, Yuichi Kurashima, et al.
Micromachines
|
February 21, 2019
Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au⁻Au Bonding Using Ultrathin Au Films
Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
June 27, 2024
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, et al.
Micromachines
|
May 1, 2020
Effect of Au Film Thickness and Surface Roughness on Room-Temperature Wafer Bonding and Wafer-Scale Vacuum Sealing by Au-Au Surface Activated Bonding
Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
November 11, 2022
Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging
Takashi Matsumae, Shingo Kariya, Yuichi Kurashima, et al.
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Search research articles
Search
Showing results (1-10 of 7) with videos related to
Sort By:
Page
of 1
Scientific Reports
|
May 28, 2021
Low-temperature direct bonding of InP and diamond substrates under atmospheric conditions
Takashi Matsumae, Ryo Takigawa, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
January 21, 2023
High-Efficiency Plasma Source Using a Magnetic Mirror Trap for Miniature-Ion Pumps
Yuichi Kurashima, Taisei Motomura, Shinya Yanagimachi, et al.
Microsystems & Nanoengineering
|
January 28, 2022
Bonding formation and gas absorption using Au/Pt/Ti layers for vacuum packaging
Shingo Kariya, Takashi Matsumae, Yuichi Kurashima, et al.
Micromachines
|
February 21, 2019
Comparison of Argon and Oxygen Plasma Treatments for Ambient Room-Temperature Wafer-Scale Au⁻Au Bonding Using Ultrathin Au Films
Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
June 27, 2024
Ultra-High Vacuum Cells Realized by Miniature Ion Pump Using High-Efficiency Plasma Source
Yuichi Kurashima, Atsuhiko Maeda, Naoto Oshima, et al.
Micromachines
|
May 1, 2020
Effect of Au Film Thickness and Surface Roughness on Room-Temperature Wafer Bonding and Wafer-Scale Vacuum Sealing by Au-Au Surface Activated Bonding
Michitaka Yamamoto, Takashi Matsumae, Yuichi Kurashima, et al.
Sensors (Basel, Switzerland)
|
November 11, 2022
Wafer-Scale Room-Temperature Bonding of Smooth Au/Ti-Based Getter Layer for Vacuum Packaging
Takashi Matsumae, Shingo Kariya, Yuichi Kurashima, et al.
Page
of 1