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Micromachines|August 28, 2020
Progresses in Synthesis and Application of SiC Films: From CVD to ALD and from MEMS to NEMSMariana Fraga, Rodrigo PessoaMicromachines|April 26, 2025
Investigation on Electromigration-Induced Failure and Reservoir Effect in AlCu InterconnectsYuanxiang Zhang, Guoquan Jiang, Jingbo Zhao, et al.Micromachines|April 26, 2025
A 3D DC Electric Field Meter Based on Sensor Chips Packaged Using a Highly Sensitive SchemePengfei Yang, Xiaolong Wen, Xiaonan Li, et al.Micromachines|April 26, 2025
A Novel AlN/Sc0.2Al0.8N-Based Piezoelectric Composite Thin-Film-Enabled Bioinspired Honeycomb MEMS HydrophoneFansheng Meng, Chaoshuai Zhang, Guojun Zhang, et al.Micromachines|April 26, 2025
An Overview of Substrate Copper Trace Crack Through Experiments, Characterization, and Numerical SimulationsWei Yu, Faxing Che, Vance Liu, et al.Micromachines|April 26, 2025
A Review on AC-Dielectrophoresis of NanoparticlesTonoy K Mondal, Aaditya V B Bangaru, Stuart J WilliamsMicromachines|April 26, 2025
The Enhanced Measurement Method Based on Fiber Bragg Grating Sensor for Structural Health MonitoringShengtao Niu, Ru LiMicromachines|April 26, 2025
Feedrate Fluctuation Minimization for NURBS Tool Path Interpolation Based on Arc Length Compensation and IterationXing Liu, Pengxin Yu, Haiduo Chen, et al.Micromachines|April 26, 2025
Two-Phase Approach for Fast Topology Optimization of Multi-Resonant MEMS Involving Model Order ReductionSiyang Hu, Billy Manansala, Ulrike Fitzer, et al.Micromachines|April 26, 2025
A Low-Frequency Multi-Band Piezoelectric MEMS Acoustic Sensor Inspired by Ormia ochraceaYi Liu, Liye Zhao, Xukai DingPageof 1,317