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Micromachines|July 27, 2024
Bearingless Inertial Rotational Stage for Atomic Force MicroscopyEva Osuna, Aitor Zambudio, Pablo Ares, et al.
Micromachines|July 27, 2024
Temperature Compensation for MEMS Accelerometer Based on a Fusion AlgorithmYangyanhao Guo, Zihan Zhang, Longkang Chang, et al.
Micromachines|July 27, 2024
Optimization of Grayscale Lithography for the Fabrication of Flat Diffractive Infrared Lenses on Silicon WafersAngelos Bouchouri, Muhammad Nadeem Akram, Per Alfred Øhlckers, et al.
Micromachines|July 27, 2024
A Low-Power and Robust Micromachined Thermal Convective AccelerometerYizhou Ye, Shu Wan, Chen Hou, et al.
Micromachines|July 27, 2024
Structure and Properties of Bioactive Titanium Dioxide Surface Layers Produced on NiTi Shape Memory Alloy in Low-Temperature PlasmaJustyna Witkowska, Tomasz Borowski, Krzysztof Kulikowski, et al.
Micromachines|July 27, 2024
Integration of Sm2Co17 Micromagnets in a Ferromagnetic Multipolar Microrotor to Enhance MEMS and Micromotor PerformanceEfren Diez-Jimenez, Alberto Bollero, Ignacio Valiente-Blanco, et al.
Micromachines|July 27, 2024
Design of X-Band Circulator and Isolator for High-Peak-Power ApplicationsTao Tang, Xiexun Zhang, Maged A Aldhaeebi, et al.
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