Kyle T Mahady
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Publications (1)
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|Sep 22, 2022
Monte Carlo simulation of nanoscale material focused ion beam gas-assisted etching: Ga<sup>+</sup> and Ne<sup>+</sup> etching of SiO<sub>2</sub> in the presence of a XeF<sub>2</sub> precursor gas.Kyle T Mahady, Shida Tan, Yuval Greenzweig
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