Luis Fabián Peña

3PUBLICATIONS
7CO-AUTHORS
Organometallic chemistryColloid and surface chemistryMolecular imaging (incl. electron microscopy and neutron diffraction)
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Publications (3)

|Jul 09, 2021
Ultradoping Boron on Si(100) via Solvothermal Chemistry*.

Esther Frederick, Quinn Campbell, Igor V Kolesnichenko

|Oct 19, 2018
Vapor-Phase Cleaning and Corrosion Inhibition of Copper Films by Ethanol and Heterocyclic Amines.

Luis Fabián Peña, Jean-Francois Veyan, Michael A Todd

|Jan 31, 2018
In Situ Infrared Absorption Study of Plasma-Enhanced Atomic Layer Deposition of Silicon Nitride.

Luis Fabián Peña, Eric C Mattson, Charith E Nanayakkara

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Frequent Collaborators

2 joint publications

Yves J Chabal

1 joint publications

Esther Frederick

1 joint publications

Quinn Campbell

1 joint publications

Igor V Kolesnichenko