Won-Jun Lee
7PUBLICATIONS
8CO-AUTHORS
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Publications (7)
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|Mar 27, 2024
Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study.Tanzia Chowdhury, Khabib Khumaini, Romel Hidayat
|Aug 14, 2023
A theoretical study on the surface reaction of tetrakis(dimethylamino)titanium on titanium oxide.Hye-Lee Kim, Romel Hidayat, Khabib Khumaini
|Jan 17, 2023
Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study.Romel Hidayat, Hye-Lee Kim, Khabib Khumaini
|May 06, 2022
Atomic layer deposition and tellurization of Ge-Sb film for phase-change memory applications.Yewon Kim, Byeol Han, Yu-Jin Kim
|Jul 19, 2021
Process Steps for High Quality Si-Based Epitaxial Growth at Low Temperature via RPCVD.Jongwan Jung, Baegmo Son, Byungmin Kam
|May 17, 2018
Catalyzed Atomic Layer Deposition of Silicon Oxide at Ultralow Temperature Using Alkylamine.Tirta R Mayangsari, Jae-Min Park, Luchana L Yusup
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