Romel Hidayat
3PUBLICATIONS
5CO-AUTHORS
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Publications (3)
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|Mar 27, 2024
Chemisorption of silicon tetrachloride on silicon nitride: a density functional theory study.Tanzia Chowdhury, Khabib Khumaini, Romel Hidayat
|Aug 14, 2023
A theoretical study on the surface reaction of tetrakis(dimethylamino)titanium on titanium oxide.Hye-Lee Kim, Romel Hidayat, Khabib Khumaini
|Jan 17, 2023
Selective etching mechanism of silicon oxide against silicon by hydrogen fluoride: a density functional theory study.Romel Hidayat, Hye-Lee Kim, Khabib Khumaini
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