Mathias Franz

2PUBLICATIONS
5CO-AUTHORS
Main group metal chemistryMicro- and nanosystems
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Publications (2)

|Sep 22, 2023
Low temperature atomic layer deposition of cobalt using dicobalt hexacarbonyl-1-heptyne as precursor.

Mathias Franz, Mahnaz Safian Jouzdani, Lysann Kaßner

|Oct 08, 2020
Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir.

Mathias Franz, Romy Junghans, Paul Schmitt

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Frequent Collaborators

1 joint publications

Romy Junghans

1 joint publications

Paul Schmitt

1 joint publications

Adriana Szeghalmi

1 joint publications

Mahnaz Safian Jouzdani