Romy Junghans

1PUBLICATIONS
3CO-AUTHORS
Micro- and nanosystems
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Publications (1)

|Oct 08, 2020
Wafer-level integration of self-aligned high aspect ratio silicon 3D structures using the MACE method with Au, Pd, Pt, Cu, and Ir.

Mathias Franz, Romy Junghans, Paul Schmitt

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