Shreya Kundu
2PUBLICATIONS
3CO-AUTHORS
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Publications (2)
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|Oct 29, 2025
Patterning of Mg-Based Oxide Semiconductors (MgZnO) at Sub-100 nm Pitches: Reactive Ion Etching versus Atomic Layer Etching.Leila Ghorbani, Souvik Kundu, Alexandru Pavel
|Jul 19, 2022
High-Density Patterning of InGaZnO by CH4: a Comparative Study of RIE and Pulsed Plasma ALE.Shreya Kundu, Stefan Decoster, Philippe Bezard
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