Anastasiia Kruv

1PUBLICATIONS
2CO-AUTHORS
Elemental semiconductors
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Publications (1)

|Oct 29, 2025
Patterning of Mg-Based Oxide Semiconductors (MgZnO) at Sub-100 nm Pitches: Reactive Ion Etching versus Atomic Layer Etching.

Leila Ghorbani, Souvik Kundu, Alexandru Pavel

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