Nikhil Tiwale

17PUBLICATIONS
66CO-AUTHORS
Elemental semiconductorsCompound semiconductorsNanoscale characterisationFunctional materialsComposite and hybrid materials
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Publications (17)

|Oct 23, 2026
Revealing Structure-Driven Performance of Molecular-Atomic Layer Deposited Resists for Extreme Ultraviolet Lithography through In Situ Analysis.

|Sep 26, 2026
Mitigating X-ray-Induced Damage in CD-SAXS Metrology of EUV Resists.

|Jun 12, 2026
Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography.

|May 29, 2026
Engineering Assembly Kinetics and Line Roughness in Solvent Vapor-Annealed Block Copolymer/Homopolymer Blends.

|Mar 02, 2026
Mechanism of Vapor-Phase Infiltration of Organometallic Hf in Poly(Methyl Methacrylate) for Hybrid Resist Applications.

Md Istiaque Chowdhury, Xinpei Wu, Won-Il Lee

|Mar 02, 2026
Alumina Priming-Mediated Enhanced Binding of Diethylzinc with Carbonyl Groups in Poly(Methyl Methacrylate) during Vapor-Phase Infiltration.

Nikhil Tiwale, Ashwanth Subramanian, Sayantani Sikder

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Frequent Collaborators

11 joint publications

Chang-Yong Nam

3 joint publications

Myung Mo Sung

3 joint publications

Oleg Gang

3 joint publications

Gregory S Doerk