Chang-Yong Nam

36PUBLICATIONS
85CO-AUTHORS
Compound semiconductorsChemical and thermal processes in energy and combustionCircuits and systemsNanoscale characterisationElectrical energy generation (incl. renewables, excl. photovoltaics)
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Journal

Publications (36)

|Sep 26, 2026
Mitigating X-ray-Induced Damage in CD-SAXS Metrology of EUV Resists.

|Sep 16, 2026
Holistic Laser Scribing Strategy for Perovskite Modules: Coupled P1-P2-P3 Optimization toward Low CTM Loss and Improved Stability.

|Jun 20, 2026
Ta Phase Engineering for Defect-Controlled Reliable Switching in Ultrathin TaOx Memristors.

|Jun 12, 2026
Recent efforts of vapour-phase strategies for EUV resist toward high- and hyper-NA extreme ultraviolet lithography.

|May 25, 2026
Coupled Roles of Surface Chemistry and Hydrogen-Assisted Cycling in Ruthenium Atomic Layer Deposition on Silicon Oxides.

|Apr 09, 2026
Small Molecule Inhibitor-Modulated Al2O3 Atomic Layer Deposition on Monolayer MoS2 for Controlled Nucleation.

Hwan Oh, Qin Wu, Suji Park

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Frequent Collaborators

10 joint publications

Nikhil Tiwale

7 joint publications

Won-Il Lee

7 joint publications

Ashwanth Subramanian

4 joint publications

Haiqing Lin