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Igor O Usov

1PUBLICATIONS

6CO-AUTHORS

Metals and alloy materials

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Publications (1)

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|Nov 18, 2024

An automatic multi-precursor flow-type atomic layer deposition system.

Daniel J Rodriguez, Mai A Her, Igor O Usov

Pageof 1

Frequent Collaborators

1 joint publications

Daniel J Rodriguez

1 joint publications

Mai A Her

1 joint publications

D J Safarik

1 joint publications

Rommel Jones

1 joint publications

Michael G Heidlage

1 joint publications

Timothy J Gorey

Frequent Collaborators

1 joint publications

Daniel J Rodriguez

1 joint publications

Mai A Her

1 joint publications

D J Safarik

1 joint publications

Rommel Jones

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