Min Liu

3PUBLICATIONS
2CO-AUTHORS
MicroelectronicsMicroelectromechanical systems (MEMS)
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Journal

Publications (3)

|Jun 27, 2024
Design and Fabrication of Micro/Nano Sensors and Actuators.

Weidong Wang, Ruiguo Yang, Min Liu

|Jun 27, 2024
Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II.

Weidong Wang, Yong Ruan, Zaifa Zhou

|Aug 26, 2023
Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams.

Haotian Yang, Min Liu, Yingmin Zhu

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