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Min Liu

3PUBLICATIONS

2CO-AUTHORS

MicroelectronicsMicroelectromechanical systems (MEMS)

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Publications (3)

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|Jun 27, 2024

Design and Fabrication of Micro/Nano Sensors and Actuators.

Weidong Wang, Ruiguo Yang, Min Liu

|Jun 27, 2024

Design and Fabrication of Micro/Nano Sensors and Actuators, Volume II.

Weidong Wang, Yong Ruan, Zaifa Zhou

|Aug 26, 2023

Characterization of Residual Stress in SOI Wafers by Using MEMS Cantilever Beams.

Haotian Yang, Min Liu, Yingmin Zhu

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Frequent Collaborators

3 joint publications

Weidong Wang

1 joint publications

Zaifa Zhou

Frequent Collaborators

3 joint publications

Weidong Wang

1 joint publications

Zaifa Zhou

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