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Design and Fabrication of Micro/Nano Sensors and Actuators
Weidong Wang1, Ruiguo Yang2, Min Liu1
1School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
Micromachines
|June 27, 2024
Abstract:
A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communication interfaces into one or more chips [...].

