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Guang-Li Luo

1PUBLICATIONS

1CO-AUTHORS

Elemental semiconductors

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|May 07, 2025

Super High-k Dielectric via Composition-Dependent Hafnium Zirconium Oxide Superlattice for Si Nanosheet Gate-All-Around Field-Effect Transistors with NH<sub>3</sub> Plasma-Optimized Interfaces.

Yi-Ju Yao, Yu-Min Fu, Yu-Hung Chen

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Yi-Ju Yao

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Yi-Ju Yao

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