Yi-Ju Yao

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1CO-AUTHORS
Elemental semiconductors
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Publications (1)

|May 07, 2025
Super High-k Dielectric via Composition-Dependent Hafnium Zirconium Oxide Superlattice for Si Nanosheet Gate-All-Around Field-Effect Transistors with NH3 Plasma-Optimized Interfaces.

Yi-Ju Yao, Yu-Min Fu, Yu-Hung Chen

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Frequent Collaborators

1 joint publications

Guang-Li Luo