Seong Ju Wi
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Jan 21, 2023
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane.Seong Ju Wi, Yong Ju Jang, Dong Gi Lee
|Apr 21, 2022
Investigation of the Resistivity and Emissivity of a Pellicle Membrane for EUV Lithography.Seong Ju Wi, Yong Ju Jang, Haneul Kim
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