Seon Yong Kim
2PUBLICATIONS
3CO-AUTHORS
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Publications (2)
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|Jan 21, 2023
Investigating the Degradation of EUV Transmittance of an EUV Pellicle Membrane.Seong Ju Wi, Yong Ju Jang, Dong Gi Lee
|Dec 10, 2021
Microstructures of HfOx Films Prepared via Atomic Layer Deposition Using La(NO3)3·6H2O Oxidants.Seon Yong Kim, Yong Chan Jung, Sejong Seong
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