Mahmut Sami Kavrik
3PUBLICATIONS
3CO-AUTHORS
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Publications (3)
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|Nov 30, 2019
Understanding the Mechanism of Electronic Defect Suppression Enabled by Nonidealities in Atomic Layer Deposition.Mahmut Sami Kavrik, Aaron Bostwick, Eli Rotenberg
|Apr 03, 2019
Engineering High- k/SiGe Interface with ALD Oxide for Selective GeO <sub>x</sub> Reduction.Mahmut S Kavrik, Peter Ercius, Joanna Cheung
|Aug 04, 2018
Ultralow Defect Density at Sub-0.5 nm HfO<sub>2</sub>/SiGe Interfaces via Selective Oxygen Scavenging.Mahmut S Kavrik, Emily Thomson, Evgueni Chagarov
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