Clemens Mart

1PUBLICATIONS
1CO-AUTHORS
Terahertz physics
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Publications (1)

|Jul 24, 2019
ToF-SIMS 3D Analysis of Thin Films Deposited in High Aspect Ratio Structures via Atomic Layer Deposition and Chemical Vapor Deposition.

Alireza M Kia, Nora Haufe, Sajjad Esmaeili

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Riikka L Puurunen