Paul C Lemaire

3PUBLICATIONS
9CO-AUTHORS
Catalysis and mechanisms of reactionsNanofabrication, growth and self assemblyMetals and alloy materials
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Publications (3)

|Mar 25, 2022
Relation between Reactive Surface Sites and Precursor Choice for Area-Selective Atomic Layer Deposition Using Small Molecule Inhibitors.

Marc J M Merkx, Athanasios Angelidis, Alfredo Mameli

|Feb 21, 2018
Thermally Driven Self-Limiting Atomic Layer Etching of Metallic Tungsten Using WF6 and O2.

Wenyi Xie, Paul C Lemaire, Gregory N Parsons

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