Thi-Thuy-Nga Nguyen
2PUBLICATIONS
1CO-AUTHORS
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Publications (2)
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|Sep 22, 2024
Nonhalogen Dry Etching of Metal Carbide TiAlC by Low-Pressure N2/H2 Plasma at Room Temperature.Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Shih-Nan Hsiao
|Nov 27, 2022
Dry etching of ternary metal carbide TiAlC via surface modification using floating wire-assisted vapor plasma.Thi-Thuy-Nga Nguyen, Kazunori Shinoda, Hirotaka Hamamura
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