Heechul Lee

13PUBLICATIONS
4CO-AUTHORS
Micro- and nanosystemsPhotovoltaic power systemsElectrical energy generation (incl. renewables, excl. photovoltaics)GlassElectrical circuits and systems
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Publications (13)

|Jun 26, 2026
Fabrication of Sub-10 μm Microvias Using Nanosecond UV Laser Drilling and a Sacrificial Metal Barrier Layer for Advanced Fine-Pitch Packaging.

|Aug 14, 2025
Fabrication and Characterization of Ferroelectric Capacitors with a Symmetric Hybrid TiN/W/HZO/W/TiN Electrode Structure.

Ha-Jung Kim, Jae-Hyuk Choi, Seong-Eui Lee

|Nov 26, 2024
Characterization of HZO Films Fabricated by Co-Plasma Atomic Layer Deposition for Ferroelectric Memory Applications.

Won-Ji Park, Ha-Jung Kim, Joung-Ho Lee

|Oct 25, 2024
Enhancing Charge Trapping Performance of Hafnia Thin Films Using Sequential Plasma Atomic Layer Deposition.

So-Won Kim, Jae-Hoon Yoo, Won-Ji Park

|Jul 29, 2023
Enhancing the Plasma-Resistance Properties of Li2O-Al2O3-SiO2 Glasses for the Semiconductor Etch Process via Alkaline Earth Oxide Incorporation.

So-Won Kim, Hwan-Seok Lee, Deok-Sung Jun

|Jun 10, 2023
Preparation of Remote Plasma Atomic Layer-Deposited HfO2 Thin Films with High Charge Trapping Densities and Their Application in Nonvolatile Memory Devices.

Jae-Hoon Yoo, Won-Ji Park, So-Won Kim

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Frequent Collaborators

10 joint publications

Sowon Kim

1 joint publications

Seong-Eui Lee

1 joint publications

Tae-Young Lee

1 joint publications

Hyun-Jin Nam