Jänis Järvilehto

1PUBLICATIONS
4CO-AUTHORS
Computational methods in fluid flow, heat and mass transfer (incl. computational fluid dynamics)
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Publications (1)

|Aug 18, 2023
Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion-reaction model and a ballistic transport-reaction model.

Jänis Järvilehto, Jorge A Velasco, Jihong Yim

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