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Thomas Frank

1PUBLICATIONS

2CO-AUTHORS

Nanoelectromechanical systems

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Publications (1)

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|Mar 27, 2019

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.

Uwe Brand, Min Xu, Lutz Doering

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Uwe Brand

1 joint publications

Lutz Doering

Frequent Collaborators

1 joint publications

Uwe Brand

1 joint publications

Lutz Doering

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