Thomas Frank

1PUBLICATIONS
2CO-AUTHORS
Nanoelectromechanical systems
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Publications (1)

|Mar 27, 2019
Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.

Uwe Brand, Min Xu, Lutz Doering

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Frequent Collaborators

1 joint publications

Uwe Brand

1 joint publications

Lutz Doering