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Lutz Doering

2PUBLICATIONS

2CO-AUTHORS

Microelectromechanical systems (MEMS)Nanoelectromechanical systems

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Publications (2)

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|Aug 26, 2022

Silicon Cantilever for Micro/Nanoforce and Stiffness Calibration.

Joachim Frühauf, Eva Gärtner, Zhi Li

|Mar 27, 2019

Long Slender Piezo-Resistive Silicon Microprobes for Fast Measurements of Roughness and Mechanical Properties inside Micro-Holes with Diameters below 100 µm.

Uwe Brand, Min Xu, Lutz Doering

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Uwe Brand

1 joint publications

Thomas Frank

Frequent Collaborators

1 joint publications

Uwe Brand

1 joint publications

Thomas Frank

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