Tao Zhang

1PUBLICATIONS
3CO-AUTHORS
Microelectromechanical systems (MEMS)
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Publications (1)

|May 13, 2023
Semi-Supervised Deep Kernel Active Learning for Material Removal Rate Prediction in Chemical Mechanical Planarization.

Chunpu Lv, Jingwei Huang, Ming Zhang

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Frequent Collaborators

1 joint publications

Chunpu Lv

1 joint publications

Ming Zhang

1 joint publications

Huangang Wang