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Uwe Detlef Zeitner

3PUBLICATIONS
16CO-AUTHORS
Elemental semiconductorsNanofabrication, growth and self assembly
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Publications (3)

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|Mar 25, 2025
Fabrication of shallow EUV gratings on silicon by irradiation with helium ions.

J Kaufmann, R Ciesielski, K Freiberg

|Dec 05, 2024
Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces.

Jeetendra Gour, Sebastian Beer, Pallabi Paul

|Sep 27, 2022
Optical properties of black silicon structures ALD-coated with Al<sub>2</sub>O<sub>3</sub>.

David Schmelz, Kristin Gerold, Thomas Käsebier

Pageof 1

Frequent Collaborators

2 joint publications

Thomas Siefke

2 joint publications

Adriana Szeghalmi

1 joint publications

J Kaufmann

1 joint publications

R Ciesielski

1 joint publications

K Freiberg

1 joint publications

A Fernández Herrero

1 joint publications

S Lippmann

1 joint publications

V Soltwisch

1 joint publications

David Schmelz

1 joint publications

Jeetendra Gour

Frequent Collaborators

2 joint publications

Thomas Siefke

2 joint publications

Adriana Szeghalmi

1 joint publications

J Kaufmann

1 joint publications

R Ciesielski

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