J Kaufmann

1PUBLICATIONS
7CO-AUTHORS
Elemental semiconductors
Featured researcher

Get your video featured.

JoVEPublish with JoVE
Journal

Publications (1)

|Mar 25, 2025
Fabrication of shallow EUV gratings on silicon by irradiation with helium ions.

J Kaufmann, R Ciesielski, K Freiberg

Pageof 1

Frequent Collaborators

1 joint publications

R Ciesielski

1 joint publications

K Freiberg

1 joint publications

A Fernández Herrero

1 joint publications

S Lippmann