Uwe Detlef Zeitner
3PUBLICATIONS
16CO-AUTHORS
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Publications (3)
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|Mar 25, 2025
Fabrication of shallow EUV gratings on silicon by irradiation with helium ions.J Kaufmann, R Ciesielski, K Freiberg
|Dec 05, 2024
Wafer-scale nanofabrication of sub-5 nm gaps in plasmonic metasurfaces.Jeetendra Gour, Sebastian Beer, Pallabi Paul
|Sep 27, 2022
Optical properties of black silicon structures ALD-coated with Al2O3.David Schmelz, Kristin Gerold, Thomas Käsebier
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Frequent Collaborators
2 joint publications
Thomas Siefke
2 joint publications
Adriana Szeghalmi
1 joint publications
J Kaufmann
1 joint publications
R Ciesielski
1 joint publications
K Freiberg
1 joint publications
A Fernández Herrero
1 joint publications
S Lippmann
1 joint publications
V Soltwisch
1 joint publications
David Schmelz
1 joint publications
Jeetendra Gour
