Leonhard M Lohr
2PUBLICATIONS
6CO-AUTHORS
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Publications (2)
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|Feb 10, 2025
Hybrid approach to reconstruct nanoscale grating dimensions using scattering and fluorescence with soft X-rays.Leonhard M Lohr, Richard Ciesielski, Vinh-Binh Truong
|Feb 01, 2023
A new sample chamber for hybrid detection of scattering and fluorescence, using synchrotron radiation in the soft x-ray and extreme ultraviolet (EUV) spectral range.Richard Ciesielski, Leonhard M Lohr, Analía Fernández Herrero
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